传感器与微系统
傳感器與微繫統
전감기여미계통
TRANSDUCER AND MICROSYSTEM TECHNOLOGY
2009年
5期
68-71
,共4页
光湿度传感器%感湿机理%有效折射率%复合模型
光濕度傳感器%感濕機理%有效摺射率%複閤模型
광습도전감기%감습궤리%유효절사솔%복합모형
optical humidity sensor%humidity-sensitive mechanism%effective refractive index%composite model
在综合分析了Maxwell-Garnett理论和有效介质理论的基础上,针对半导体湿敏陶瓷材料提出了一种新颖的复合模型,给出了以吸附参数和陶瓷材料气孔率为变量的薄膜折射率随湿度变化的理论关系.随着吸附参数的增大,SiO2薄膜的折射率增大;随着陶瓷材料气孔率的增大,SiO2薄膜的折射率将减小.利用薄膜折射率的变化检测湿度,灵敏度可以达到10-3数量级.通过计算机理论模拟与Alberto A H等人所做的实验结果对比,证明了该模型的正确性.
在綜閤分析瞭Maxwell-Garnett理論和有效介質理論的基礎上,針對半導體濕敏陶瓷材料提齣瞭一種新穎的複閤模型,給齣瞭以吸附參數和陶瓷材料氣孔率為變量的薄膜摺射率隨濕度變化的理論關繫.隨著吸附參數的增大,SiO2薄膜的摺射率增大;隨著陶瓷材料氣孔率的增大,SiO2薄膜的摺射率將減小.利用薄膜摺射率的變化檢測濕度,靈敏度可以達到10-3數量級.通過計算機理論模擬與Alberto A H等人所做的實驗結果對比,證明瞭該模型的正確性.
재종합분석료Maxwell-Garnett이론화유효개질이론적기출상,침대반도체습민도자재료제출료일충신영적복합모형,급출료이흡부삼수화도자재료기공솔위변량적박막절사솔수습도변화적이론관계.수착흡부삼수적증대,SiO2박막적절사솔증대;수착도자재료기공솔적증대,SiO2박막적절사솔장감소.이용박막절사솔적변화검측습도,령민도가이체도10-3수량급.통과계산궤이론모의여Alberto A H등인소주적실험결과대비,증명료해모형적정학성.
A novel composite model is put forward for semiconductor humidity-sensitive ceramic material based on Maxwell-Garnett and effective medium theory, and analytical expression of the relation between effective refractive index and relative humidity is showed with different absorption factors and porosities. The lager the absorption factor is, the higher the refractive index is. Refractive index of humidity-sensitive film SiO2 decreases with the increase of ceramic material porosity. The sensitivity of optical humidity sensor is available to magnitude of 10-3 In contrast to the experimental humidity-sensing curve of Alberto A H et al, the analysis of mechanism,theoretical simulation is in agreement with experimental results. So this composite model is proved to be reasonable.
