CAJ | 학술논문

介绍了硅片加工过程中3种划片方法及划片机国内外发展趋势.对金刚石砂轮刀片进行力学分析,应用有限元分析软件建立砂轮刀片回转模型,得到刀片的应力图.通过仿真得到:砂轮刀片切向应力总是大于径向应力,切向应力的最大值发生在砂轮刀片孔壁处.并且,应用基于特征的实体造型系统Pro/Engineer,建立了划片机划切过程模拟模型.为进一步进行参数化设计打下基础.
개소료규편가공과정중3충화편방법급화편궤국내외발전추세.대금강석사륜도편진행역학분석,응용유한원분석연건건립사륜도편회전모형,득도도편적응력도.통과방진득도:사륜도편절향응력총시대우경향응력,절향응력적최대치발생재사륜도편공벽처.병차,응용기우특정적실체조형계통Pro/Engineer,건립료화편궤화절과정모의모형.위진일보진행삼수화설계타하기출.
The three kinds of slicing methods during the machining progress of silicon and the trend of domestic and abroad development.With the aid of finite element analysis software,the rotary model of diamond blade was gained,then the stress nephogram was obtained.The simulation results show that the tangential stress is always larger than the radial stress,the maximum tangential stress happens on the inner surface of the diamond blade.Moreover,with the characteristic based entity sculpting software Pro/Engineer,the simulated model of slicing progress of dicing saw was established,which make the foundation for further parametric design.