CAJ | 학술논문

采用溶胶-凝胶工艺分别制备了SiO_2和ZrO_2单层薄膜、ZrO_2/SiO_2双层膜以及ZrO_2/SiO_2多层高反膜.用输出波长为1064nm、脉宽为6.3ns的YAG激光器对薄膜进行了激光损伤实验.观察了薄膜经强激光辐照后的损伤情况,讨论了薄膜的激光损伤行为,并从理论上分析了产生这些损伤的原因,为进一步镀制高质量的ZrO_2/SiO_2多层高反膜提供了依据.
채용용효-응효공예분별제비료SiO_2화ZrO_2단층박막、ZrO_2/SiO_2쌍층막이급ZrO_2/SiO_2다층고반막.용수출파장위1064nm、맥관위6.3ns적YAG격광기대박막진행료격광손상실험.관찰료박막경강격광복조후적손상정황,토론료박막적격광손상행위,병종이론상분석료산생저사손상적원인,위진일보도제고질량적ZrO_2/SiO_2다층고반막제공료의거.
Monolayer SiO_2 and ZrO_2 thin film, double-layer ZrO_2/SiO_2 thin film and ZrO_2/SiO_2 muti-layer high reflectance thin film are prepared by Sol-Gel method. The films are irradiated by a YAG high power laser whose wavelength is 1064nm and its pulse width is 6.3ns. The morphologies of the damage films are observed, the laser damage behavior of thin films is discussed, and the mechanisms of thin film damage are analyzed, these results provide basis for prepared a high quality ZrO_2/SiO_2 muti-layer high reflectance thin film in the future.