CAJ | 학술논문

根据白光等厚干涉原理,基于单片机改造的迈氏干涉仪用于自动测量透明薄膜厚度,采用非接触性测量法。当迈克尔逊干涉仪静镜形成的虚像与动镜相交所成的夹角很小时,在光屏上看到彩色干涉条纹,插入薄膜后,光程差改变,彩纹消失。步进电机带动微调手轮转动,当彩纹再次出现,即可得出透明薄膜厚度。
근거백광등후간섭원리,기우단편궤개조적매씨간섭의용우자동측량투명박막후도,채용비접촉성측량법。당매극이손간섭의정경형성적허상여동경상교소성적협각흔소시,재광병상간도채색간섭조문,삽입박막후,광정차개변,채문소실。보진전궤대동미조수륜전동,당채문재차출현,즉가득출투명박막후도。
According to the theory of equal thickness interference of white light,we have used the Michelson interferrometer reformed based on MCU to automatically measure the thickness of a transparent thin film,which is a non-contact method.When the angle between the virtual image of the static mirror and the dynamic mirror of the Michelson interferometer is very small,the colored interference fringes will appear.After inserting a thin film,the interference fringes disappear because the optical path difference changed.With rotating of the fine-tuning hand-wheel driven by stepping motor,the thickness of the thin film is measured when the interference fringes appears again.