仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
INSTRUMENT TECHNIQUE AND SENSOR
2009年
z1期
146-147
,共2页
刘英明%王健%俞大海%顾海涛%高秀敏
劉英明%王健%俞大海%顧海濤%高秀敏
류영명%왕건%유대해%고해도%고수민
高精细腔%红外吸收光谱型气体传感器%集成化
高精細腔%紅外吸收光譜型氣體傳感器%集成化
고정세강%홍외흡수광보형기체전감기%집성화
high finesse cavity%absorption spectrum gas infrared sensor%integration
对红外吸收型气体传感器的工作原理进行了分析,设计了一种基于高精细腔技术的红外吸收光谱型气体传感器.并对设计的传感器进行了实验验证,结果显示在通入浓度为20 ppm的H_2S气体时能达到40的信噪比,测量结果准确;在低浓度时测量有一定的偏差.测量的浓度波动小于3 ppm.
對紅外吸收型氣體傳感器的工作原理進行瞭分析,設計瞭一種基于高精細腔技術的紅外吸收光譜型氣體傳感器.併對設計的傳感器進行瞭實驗驗證,結果顯示在通入濃度為20 ppm的H_2S氣體時能達到40的信譟比,測量結果準確;在低濃度時測量有一定的偏差.測量的濃度波動小于3 ppm.
대홍외흡수형기체전감기적공작원리진행료분석,설계료일충기우고정세강기술적홍외흡수광보형기체전감기.병대설계적전감기진행료실험험증,결과현시재통입농도위20 ppm적H_2S기체시능체도40적신조비,측량결과준학;재저농도시측량유일정적편차.측량적농도파동소우3 ppm.
This paper analyzed the principle of the absorption spectrum gas infrared sensor and designed an absorption spectrum gas infrared sensor that based on a high finesse cavity.Through the experimental test,a 40 signal-to-noise ratio (SNR) is got when blow 20ppm H_2S gas.The metrical concentration will be deviated from the real concentration when the concentration of H_2S gas in low level.The fluctuation of the metrical concentration is less than 3 ppm.
