CAJ | 학술논문

薄膜镀层由于厚度小，难以用通常的磨损方法评估其耐磨性。本文研究了采用精密凹坑研磨仪评价薄膜镀层耐磨性的方法，并对TaN/NbN纳米多层膜和TaN、NbN单层膜进行了磨损实验。结果表明，精密凹坑研磨仪是-种适用于评价薄膜镀层耐磨性的方法。TaN/NbN纳米多层膜有比TaN、TbN单层膜更高的耐磨性。
박막도층유우후도소，난이용통상적마손방법평고기내마성。본문연구료채용정밀요갱연마의평개박막도층내마성적방법，병대TaN/NbN납미다층막화TaN、NbN단층막진행료마손실험。결과표명，정밀요갱연마의시-충괄용우평개박막도층내마성적방법。TaN/NbN납미다층막유비TaN、TbN단층막경고적내마성。
The antiwear properties of thin film coatings are difficult to be evaluated by ordinary method becausethe coatings are too thin in thickness. A precise dimple-grinding method was introduced and discussed and theantiwear properties of TaN/NbN nano-multilayer film, TaN and NhN single layer films were evaluated by thisnew method. The results show that the precise dimple-grinding method is a proper method to evaluate the antiwear properties of thin film coatings. TaN/NbN nano-multilayer film shows a better antiwear property thanTaN and NbN single layers.