传感技术学报
傳感技術學報
전감기술학보
Journal of Transduction Technology
2010年
3期
367-372
,共6页
微电子机械系统%可靠性%系统级%节点分析法%悬臂梁%Weibull分布
微電子機械繫統%可靠性%繫統級%節點分析法%懸臂樑%Weibull分佈
미전자궤계계통%가고성%계통급%절점분석법%현비량%Weibull분포
MEMS%reliability%system level%node analysis method%cantilever%Weibull distribution
随着微系统高密度和高集成度化趋势的发展,人们开始关注解决系统全局可靠性问题的设计和模拟方案.本文将传统电路领域的节点分析法移植到微系统的可靠性分析领域.通过对冲击下悬臂梁断裂可靠性问题的分析,演示了节点法分析系统全局可靠性问题的流程和可行性.利用冲击实验测量了不同方向和大小加速度冲击下的悬臂梁的断裂可靠度,基于节点模型结果和Weibull理论分析,指出工艺缺陷引起的早期失效是导致实验中较细悬臂梁约10 %断裂失效几率的主要成因.
隨著微繫統高密度和高集成度化趨勢的髮展,人們開始關註解決繫統全跼可靠性問題的設計和模擬方案.本文將傳統電路領域的節點分析法移植到微繫統的可靠性分析領域.通過對遲擊下懸臂樑斷裂可靠性問題的分析,縯示瞭節點法分析繫統全跼可靠性問題的流程和可行性.利用遲擊實驗測量瞭不同方嚮和大小加速度遲擊下的懸臂樑的斷裂可靠度,基于節點模型結果和Weibull理論分析,指齣工藝缺陷引起的早期失效是導緻實驗中較細懸臂樑約10 %斷裂失效幾率的主要成因.
수착미계통고밀도화고집성도화추세적발전,인문개시관주해결계통전국가고성문제적설계화모의방안.본문장전통전로영역적절점분석법이식도미계통적가고성분석영역.통과대충격하현비량단렬가고성문제적분석,연시료절점법분석계통전국가고성문제적류정화가행성.이용충격실험측량료불동방향화대소가속도충격하적현비량적단렬가고도,기우절점모형결과화Weibull이론분석,지출공예결함인기적조기실효시도치실험중교세현비량약10 %단렬실효궤솔적주요성인.
With the development of the high-density and high integration trends of the micro-system, the design and simulation project of solving the overall reliability problem of the system have started to be paid attention to. The nodal analysis method is transplanted from the field of traditional circuit to the reliability analysis of micro-system field. Through the analysis into the problem of cantilever beam fracturing reliability under attack, the process and feasibility of overall reliability problem will be demonstrated. The cantilever beam fracturing reliability under attack of different direction and acceleration is measured by attack experiment. Based on the results of the nodal model and Weibull theoretical analysis, it is pointed out that the early failure caused by the technical defects is the main reason for the fracturing and non-effectiveness probability of 10 % of the thinner cantilever beam.