CAJ | 학술논문

通过旋转镀膜技术的溶液沉积法制备LiMn2O4薄膜,详细讨论了影响LiMn2O4薄膜形貌的各种因素.研究表明前驱体溶液溶剂、溶液浓度、匀胶速度、升温速度以及加热分解温度和时间等对薄膜形貌有重大影响.实验表明LiMn2O4前驱体溶液浓度为0.2mol/L,匀胶速度为3000r/min,匀胶时间为30s,加热分解温度350℃,加热分解时间20min,升温速度为10℃/min为较为理想的一组合成条件.
통과선전도막기술적용액침적법제비LiMn2O4박막,상세토론료영향LiMn2O4박막형모적각충인소.연구표명전구체용액용제、용액농도、균효속도、승온속도이급가열분해온도화시간등대박막형모유중대영향.실험표명LiMn2O4전구체용액농도위0.2mol/L,균효속도위3000r/min,균효시간위30s,가열분해온도350℃,가열분해시간20min,승온속도위10℃/min위교위이상적일조합성조건.
LiMn2 O4 thin films were prepared by solution deposition through spin-coating technique. A lot of factors that might affect the morphology of thin film were investigated. The results show that the solvent, solution concentration, spin rate, spin time, heating rate, decomposing temperature, decomposing time, annealing temperature and annealing time have great influence on the microstructure of LiMn2O4 thin films. If these processing conditions are not controlled properly, they can cause cracks,large evaporation pores and result in less uniform and less dense thin film.