快速退火气氛对300mm CZ硅片吸杂效应和表面微观结构的影响
쾌속퇴화기분대300mm CZ규편흡잡효응화표면미관결구적영향
Effect of Rapid Thermal Annealing Ambient on Gettering Efficiency and Surface Microstructure in 300mm CZ Silicon Wafers
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