氧氮比对真空电弧沉积TiO2-xNx薄膜结构和性能的影响
양담비대진공전호침적TiO2-xNx박막결구화성능적영향
Effect of Pressure Ratio of Oxygen/Nitrogen on Microstructure and Performance of TiO2-xNx Thin Films by Vacuum Arc Deposition
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