CAJ | 학술논문

研制了一种基于自聚焦超晶格薄膜电光波导调制器.首先给出了自聚焦超晶格薄膜电光特性的测量和器件结构的优化设计,采用测量二次谐波生成值对入射角的依赖关系测定了薄膜的有效电光系数,保证了器件的设计精确有效.利用多层膜传输理论研究了器件电极对光波的最大吸收,并对器件结构进行了优化,获得了最小调制电压.其次给出了所加工的实验模型结构和扫描电子显微镜(SEM)图片,确保了加工质量和设计结果的一致.研究结果表明:这种无需外电场极化处理的新型聚合物薄膜电光调制器加工难度小,并且光学损耗优化到了1.0 dB/cm.
연제료일충기우자취초초정격박막전광파도조제기.수선급출료자취초초정격박막전광특성적측량화기건결구적우화설계,채용측량이차해파생성치대입사각적의뢰관계측정료박막적유효전광계수,보증료기건적설계정학유효.이용다층막전수이론연구료기건전겁대광파적최대흡수,병대기건결구진행료우화,획득료최소조제전압.기차급출료소가공적실험모형결구화소묘전자현미경(SEM)도편,학보료가공질량화설계결과적일치.연구결과표명:저충무수외전장겁화처리적신형취합물박막전광조제기가공난도소,병차광학손모우화도료1.0 dB/cm.
This paper reports a new waveguide electro-optic (EO) modulator with self-assembled superlattice (SAS) electro-optic films. This work focuses on the measurement for the EO coefficient of SAS films and the optimization for the devices structure. In order to have a precise and effective design, we test the angle-dependence of the second harmonic generation of incident laser beam to determine the effective EO coefficient. We study he absorptive loss of electrodes of devices with the optical propagation theory of multi-layered films and optimize the devices structure to obtain the lowest drive voltage. The paper gives the structure of experimental samples and the scanned electronic microscopy (SEM) pictures of our fabricated devices. Finally, 1.0 dB/cm optical propagation loss of the EO modulators is achieved, which agrees with the experimental results.