无机化学学报
無機化學學報
무궤화학학보
JOURNAL OF INORGANIC CHEMISTRY
2006年
5期
789-794
,共6页
俞开潮%Yousef Hamadan%程银华%周锦兰%李正佳%于澍燕%焦庆
俞開潮%Yousef Hamadan%程銀華%週錦蘭%李正佳%于澍燕%焦慶
유개조%Yousef Hamadan%정은화%주금란%리정가%우주연%초경
催化增强化学蒸气沉积%聚酰亚胺%钯-铂合金
催化增彊化學蒸氣沉積%聚酰亞胺%鈀-鉑閤金
최화증강화학증기침적%취선아알%파-박합금
catalyst-enhanced chemical vapor deposition%polyimide (PI)%palladium-platinum alloy
以N2,O2作载气,通过催化增强化学蒸气沉积(CECVD)分别制得在聚酰亚胺上的金属铂、钯及其合金薄层.铂、钯配合物的共同沉积可生成Pt-Pd合金薄膜.在Pd-Pt合金的沉积过程中,Pd/Pt的原子数比率随共同沉积的条件改变而变化.O2为载气、300℃条件下,用Pd(η3-allyl)(hfac)和Pt(COD)Me2作前驱体共沉积制备Pd-Pt合金,得到含Pd 37.2%,Pt 62.8%且不含碳和氟的合金.
以N2,O2作載氣,通過催化增彊化學蒸氣沉積(CECVD)分彆製得在聚酰亞胺上的金屬鉑、鈀及其閤金薄層.鉑、鈀配閤物的共同沉積可生成Pt-Pd閤金薄膜.在Pd-Pt閤金的沉積過程中,Pd/Pt的原子數比率隨共同沉積的條件改變而變化.O2為載氣、300℃條件下,用Pd(η3-allyl)(hfac)和Pt(COD)Me2作前驅體共沉積製備Pd-Pt閤金,得到含Pd 37.2%,Pt 62.8%且不含碳和氟的閤金.
이N2,O2작재기,통과최화증강화학증기침적(CECVD)분별제득재취선아알상적금속박、파급기합금박층.박、파배합물적공동침적가생성Pt-Pd합금박막.재Pd-Pt합금적침적과정중,Pd/Pt적원자수비솔수공동침적적조건개변이변화.O2위재기、300℃조건하,용Pd(η3-allyl)(hfac)화Pt(COD)Me2작전구체공침적제비Pd-Pt합금,득도함Pd 37.2%,Pt 62.8%차불함탄화불적합금.
Pd, Pt and their alloy films on polyimide were prepared by Catalyst-Enhanced Chemical Vapor Deposition (CECVD) under the carrier gas (N2, O2). Co-deposition of Pd and Pt complexes was used for deposition of alloy film. During the CVD of palladium-platinum alloy, the Pd/Pt atomic ratios varied with co-deposition conditions. Co-deposition of Pd(η3-allyl)(hfac) and Pt(COD)Me2 under O2 at 300 ℃ produced palladium-platinum alloy containing palladium of 37.2% and platinum of 62.8%, respectively without the contamination of carbon and fluorine.
