功能材料与器件学报
功能材料與器件學報
공능재료여기건학보
JOURNAL OF FUNCTIONAL MATERIALS AND DEVICES
2010年
2期
191-196
,共6页
张志海%史成武%孙嵩泉%吴玉程
張誌海%史成武%孫嵩泉%吳玉程
장지해%사성무%손숭천%오옥정
喷雾热解%二氧化锡%氟掺杂%导电玻璃
噴霧熱解%二氧化錫%氟摻雜%導電玻璃
분무열해%이양화석%불참잡%도전파리
spray pyrolysis%tin oxide%doped with fluorine%conductive glass
采用喷雾热解法,以四氯化锡和氟化铵为原料、喷瓶为雾化装置,在载玻片上制得氟掺杂二氧化锡(fTO)透明导电薄膜.运用XRD、SEM、紫外-可见分光光度计和四探针测试仪分别对薄膜进行了表征.研究了喷涂次数、衬底温度、前体浓度、掺杂浓度和醇水比对FTO薄膜光电性能的影响.结果表明,当衬底温度为500℃,SnCl4·5H2O浓度为0.81 mol/L,NH4F浓度为0.1 mol/L,醇水比为8:2,喷涂100次时,薄膜的光电性能较好,其方块电阻为13Ω/口,平均透光率为79%.
採用噴霧熱解法,以四氯化錫和氟化銨為原料、噴瓶為霧化裝置,在載玻片上製得氟摻雜二氧化錫(fTO)透明導電薄膜.運用XRD、SEM、紫外-可見分光光度計和四探針測試儀分彆對薄膜進行瞭錶徵.研究瞭噴塗次數、襯底溫度、前體濃度、摻雜濃度和醇水比對FTO薄膜光電性能的影響.結果錶明,噹襯底溫度為500℃,SnCl4·5H2O濃度為0.81 mol/L,NH4F濃度為0.1 mol/L,醇水比為8:2,噴塗100次時,薄膜的光電性能較好,其方塊電阻為13Ω/口,平均透光率為79%.
채용분무열해법,이사록화석화불화안위원료、분병위무화장치,재재파편상제득불참잡이양화석(fTO)투명도전박막.운용XRD、SEM、자외-가견분광광도계화사탐침측시의분별대박막진행료표정.연구료분도차수、츤저온도、전체농도、참잡농도화순수비대FTO박막광전성능적영향.결과표명,당츤저온도위500℃,SnCl4·5H2O농도위0.81 mol/L,NH4F농도위0.1 mol/L,순수비위8:2,분도100차시,박막적광전성능교호,기방괴전조위13Ω/구,평균투광솔위79%.
Transparent conducting thin films of F:SnO2 have been deposited onto preheated microscopic glass slides by intermittent spray pyrolysis deposition using pentahydrate stannic chloride(SnCl4·5H2O)and ammonium fluoride(NH4F)as precursors.A perfume atomizer for cosmetics use has been used for deposition.As-deposited films were characterized by XRD,SEM,UV-VIS spectrophotometer and four-point-probe setup.The influence of spray times,substrate temperature,precursor concentration,doping concentration and ethanol to water ratio on the optical and electrical properties of films above mentioned were discussed.The results show that the sheet resistance of the thin films is 13Ω/□ and the average transmittance is 79%,when the concentration of SnCl4·5H2O is 0.81 mol/L,the concentration of NH4F is 0.1 mol/L,the ethanol to water ratio is 8:2,being sprayed 100 times at 500 ℃.