CAJ | 학술논문

采用微机电系统技术制作了螺线管电感.为了获得高电感量和Q值,采用UV-LIGA、干法刻蚀、抛光和电镀技术,研制的电感大小为1500μm×900μm×70μm,线圈匝数为41匝,宽度为20μm,线圈之间的间隙为20μm,高深宽比为3.5:1.测试结果表明电感量最大值为6.17nH,Q值约为6.
채용미궤전계통기술제작료라선관전감.위료획득고전감량화Q치,채용UV-LIGA、간법각식、포광화전도기술,연제적전감대소위1500μm×900μm×70μm,선권잡수위41잡,관도위20μm,선권지간적간극위20μm,고심관비위3.5:1.측시결과표명전감량최대치위6.17nH,Q치약위6.
A solenoid-type inductor for high frequency application is realized using a micro-electro-mechanical systems (MEMS) technique. In order to achieve a high inductance value and Q-factor, UV-LIGA, dry etching technique,fine polishing and electroplating technique are adopted. The dimensions of the inductor are 1500μm × 900μm × 70μm,having 41 turns with a coil width of 20μm separated by 20μm spaces and a high aspect ratio of 3. 5 : 1. The maximum measured inductance of the inductor is 6.17nH with a Q-factor of about 6.