CAJ | 학술논문

相移干涉法具有非接触、快速和高精度等优点,采用实验室组建的相移干涉系统进行平面度测量时,会产生280nm左右的测量误差.通过对系统误差的分析,发现由扩束器产生的波像差是测量误差的主要来源.为了校正该测量误差,采用Zernike多项式拟合波前像差,然后在平面度测量时扣除该数值拟合结果.实验结果表明,这种误差校正方法可以使λ/4平面反射镜的测量结果从误差校正前的320nm左右减小到120nm左右.
상이간섭법구유비접촉、쾌속화고정도등우점,채용실험실조건적상이간섭계통진행평면도측량시,회산생280nm좌우적측량오차.통과대계통오차적분석,발현유확속기산생적파상차시측량오차적주요래원.위료교정해측량오차,채용Zernike다항식의합파전상차,연후재평면도측량시구제해수치의합결과.실험결과표명,저충오차교정방법가이사λ/4평면반사경적측량결과종오차교정전적320nm좌우감소도120nm좌우.
Phase-Shifting Interferometry(PSI)method has many merits such as non-contact,quickness,high precision.A laboratory-made PSI system has a 280nm measurement error in the flatness detection.After analyzing the measurement errors of the PSI system,the main source limiting the accuracy is wave-front aberration caused by beam expander.To calibrate measurement errors,wave-front aberration is simulated mathematically by using Zernike polynomials and then separated the simulated values from flatness measurement results.The experimental results indicate that the flatness measurement results of λ/4 mirror could be improved from the level of 320nm to 120nm by the calibration method.