嘉应学院学报
嘉應學院學報
가응학원학보
JOURNAL OF JIAYING UNIVERSITY
2011年
11期
32-35
,共4页
柱状薄膜%动力学蒙特卡罗%倾斜沉积法
柱狀薄膜%動力學矇特卡囉%傾斜沉積法
주상박막%동역학몽특잡라%경사침적법
columnar thin films%Kinetic Monte Carlo%glancing angle deposition
建立了弹道入射的薄膜三维蒙特卡罗形貌仿真模型,模拟了倾斜沉积情况下柱状薄膜的生长形貌,研究了沉积角度对柱状薄膜形貌的影响.通过动力系蒙特卡罗模拟,分析了雕塑薄膜生长过程中的阴影效应,并且验证了在倾斜沉积实验条件下,斜柱状薄膜生长模式的稳定性,这为后续准确控制雕塑薄膜结构并实现量化控制提供重要的理论依据.
建立瞭彈道入射的薄膜三維矇特卡囉形貌倣真模型,模擬瞭傾斜沉積情況下柱狀薄膜的生長形貌,研究瞭沉積角度對柱狀薄膜形貌的影響.通過動力繫矇特卡囉模擬,分析瞭彫塑薄膜生長過程中的陰影效應,併且驗證瞭在傾斜沉積實驗條件下,斜柱狀薄膜生長模式的穩定性,這為後續準確控製彫塑薄膜結構併實現量化控製提供重要的理論依據.
건립료탄도입사적박막삼유몽특잡라형모방진모형,모의료경사침적정황하주상박막적생장형모,연구료침적각도대주상박막형모적영향.통과동력계몽특잡라모의,분석료조소박막생장과정중적음영효응,병차험증료재경사침적실험조건하,사주상박막생장모식적은정성,저위후속준학공제조소박막결구병실현양화공제제공중요적이론의거.
A three- dimensional kinetic Monte Carlo simulation model has been developed. Using this model, we explore the growth process during glancing angle deposition with different incidence angles. Shadowing effect de- pendence of growth morphology is discussed. Furthermore, we demonstrate the stability of the columnar growth model when the coverage is increased. These resuhs will provide a theoretically guide for the precise control of columnar thin films during experiment.