CAJ | 학술논문

采用冷壁化学气相沉积系统,利用H2还原WF6工艺,在纯铜管表面制备获得了高纯钨材料.在440℃沉积温度下,得到具有混合相的钨管,其压缩性能远低于在540℃条件下得到的只具有α相的钨管.由此表明,β-W的出现极大地降低了钨管的压缩性能在400℃条件下,对具有混合相的钨管进行1h保护气氛退火后,钨管材料中的β相消失,同时其压缩性能与只具有α相的沉积态钨管相近.
채용랭벽화학기상침적계통,이용H2환원WF6공예,재순동관표면제비획득료고순오재료.재440℃침적온도하,득도구유혼합상적오관,기압축성능원저우재540℃조건하득도적지구유α상적오관.유차표명,β-W적출현겁대지강저료오관적압축성능재400℃조건하,대구유혼합상적오관진행1h보호기분퇴화후,오관재료중적β상소실,동시기압축성능여지구유α상적침적태오관상근.
The high pure W(HPW)was deposited on the surface of purity Cu tubes through WF6 reduction by H2 adopting cold-wall atmospheric pressure CVD system.Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440℃ is much lower than that with only a phase deposited at 540℃.The existence of β phase has a significant negative influence on the compressive property.After annealing treatment at 400℃ for 1 h,the β phase in the mixture will disappear,and its compressive strength reaches the level of the as-depositedα-W.