正偏压作用下多弧离子镀ZrO2薄膜的组织结构与力学性能研究
정편압작용하다호리자도ZrO2박막적조직결구여역학성능연구
Microstructure and Mechanical Properties of ZrO2 Thin Films Prepared in Vacuum Cathodic Arc Deposition by Using a Positively Biased Electrode
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