CAJ | 학술논문

为实现球面波干涉检测非球面镜片,得到非球面镜片的完整面形信息,提出了基于标记的Givens变换,实现环形子孔径的精确定位和消旋转的处理.利用求解目标函数最小值的方法精确求解拟合波面以对子孔径数据进行处理,建立了全局优化拼接数学模型.对外径150 mm,内径100 mm的抛物面镜片进行三孔径拼接检测实验,均方根值为0.053 λ.对比补偿器法得到的全口径干涉检测结果均方根值△Wrms=0.052 λ,相对误差为1.92%.实验结果表明,该方法稳定可靠,降低了传统的环形子孔径拼接干涉检测方法中对导轨的高精度要求.
위실현구면파간섭검측비구면경편,득도비구면경편적완정면형신식,제출료기우표기적Givens변환,실현배형자공경적정학정위화소선전적처리.이용구해목표함수최소치적방법정학구해의합파면이대자공경수거진행처리,건립료전국우화병접수학모형.대외경150 mm,내경100 mm적포물면경편진행삼공경병접검측실험,균방근치위0.053 λ.대비보상기법득도적전구경간섭검측결과균방근치△Wrms=0.052 λ,상대오차위1.92%.실험결과표명,해방법은정가고,강저료전통적배형자공경병접간섭검측방법중대도궤적고정도요구.
In order to obtain the whole aspheric lens' surface information, measurement of aspheric optical components is implemented by using spheric wave interferometry. Problems of precise location and removing relative rotation are resolved by the Givens transform of markers' position. Each subaperture's data is processed by the best fitting wave front which is the solution of the least object function value. Global optimization stitching model is established. A parabolic mirror of 150 mm in outer diameter, 100 mm in inner diameter was used in three annular subapertures stitching experiment, the obtained root mean square (RMS) is 0. 053 λ. Compared with full caliber interference measurement results obtained by compensator method, △Wrms = 0.052 λ, the relative error of RMS is 1.92%. Experimental results indicate that the approach reduces the requirements of high-precision rail in traditional annular subaperture stitching interference measurement.