CAJ | 학술논문

提出了一种带有光线漂移补偿的测量导轨俯仰角误差、偏摆角误差的方法及系统.将平面反射镜作为角度测量敏感元件,利用二维位置敏感探测器(PSD)和透镜组合来实时监测激光器本身所引起的光线角度漂移.实验结果表明:使用本系统测量导轨的角度误差,由激光器本身所引起的光线角度漂移对导轨偏摆角及俯仰角误差的影响可分别减少89.3%和69.2%,进一步提高了导轨角度误差测量的精度.
제출료일충대유광선표이보상적측량도궤부앙각오차、편파각오차적방법급계통.장평면반사경작위각도측량민감원건,이용이유위치민감탐측기(PSD)화투경조합래실시감측격광기본신소인기적광선각도표이.실험결과표명:사용본계통측량도궤적각도오차,유격광기본신소인기적광선각도표이대도궤편파각급부앙각오차적영향가분별감소89.3%화69.2%,진일보제고료도궤각도오차측량적정도.
A method and system based on compensation for beam drift are put forward in order to measure pitch and yaw errors. The angular drift of laser can be compensated. With the mirror as angular detector,2-D position-sensitive detector and a lens are used to monitor angular drift of laser real-time. Experimental results show that the angular drift induced by laser can be lessened by about 89.3% and 69.2% respectively. The measuring precision of angular errors is improved further.