西安电子科技大学学报(自然科学版)
西安電子科技大學學報(自然科學版)
서안전자과기대학학보(자연과학판)
JOURNAL OF XIDIAN UNIVERSITY
2001年
3期
301-305
,共5页
刘家璐%李煜%刘传洋%刘泽%宋李梅%张廷庆
劉傢璐%李煜%劉傳洋%劉澤%宋李梅%張廷慶
류가로%리욱%류전양%류택%송리매%장정경
应力%钝化膜%锑化铟%可靠性
應力%鈍化膜%銻化銦%可靠性
응력%둔화막%제화인%가고성
根据线性弹性理论集中力的假定，计算了矩形膜淀积在InSb衬底上的三维应力分布；讨论了钝化膜对InSb衬底应力的影响；提出了提高InSb平面二极管可靠性的措施．
根據線性彈性理論集中力的假定，計算瞭矩形膜澱積在InSb襯底上的三維應力分佈；討論瞭鈍化膜對InSb襯底應力的影響；提齣瞭提高InSb平麵二極管可靠性的措施．
근거선성탄성이론집중력적가정，계산료구형막정적재InSb츤저상적삼유응력분포；토론료둔화막대InSb츤저응력적영향；제출료제고InSb평면이겁관가고성적조시．
The three-dimensional stress distributions in a substrate due to a rectangular film deposited on the substrate are calculated by the linear elastic theory on the assumption of a concentrated force at the film and the effect of the passivation film on stress distribution in the InSb substrate are discussed. Finally, the mea-sures for improving the reliability of the InSb plane diode are proposed.
