CAJ | 학술논문

研究了一种基于硅悬臂梁谐振器的新型气体传感器.该传感器在敏感环境中,可同时获得敏感膜电导率和质量变化,测量被测气体分子的荷质比,具有高灵敏度和高选择性.根据这一原理,针对气体传感器的需求,设计了硅悬臂梁谐振器化学传感器结构,进行了仿真优化,并采用MEMS表面牺牲层工艺制备该器件,激光频率仪测量验证了该微型谐振梁的谐振频率.
연구료일충기우규현비량해진기적신형기체전감기.해전감기재민감배경중,가동시획득민감막전도솔화질량변화,측량피측기체분자적하질비,구유고령민도화고선택성.근거저일원리,침대기체전감기적수구,설계료규현비량해진기화학전감기결구,진행료방진우화,병채용MEMS표면희생층공예제비해기건,격광빈솔의측량험증료해미형해진량적해진빈솔.
A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated. High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules. Structures of silicon beam resonators are designed, simulated, and optimized. This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology, and the resonant frequency of the microbeam is measured.