CAJ | 학술논문

为提高808nm垂直腔面发射半导体激光器(VCSEL)的输出功率与电光转换效率,对其湿法氧化工艺进行了实验研究.采用扫描电镜(SEM)的微区分析功能,对样品氧化层按不同的氧化深度进行微区分析.微区分析结果表明:适当降低氧化温度,延长氧化时间,可减小氧化限制孔径的控制误差,提高氧化工艺的准确性;氧化后对样品进行高温加热处理,可减少氧化层中的As含量,改善氧化层的质量,提高氧化工艺的热稳定性.
위제고808nm수직강면발사반도체격광기(VCSEL)적수출공솔여전광전환효솔,대기습법양화공예진행료실험연구.채용소묘전경(SEM)적미구분석공능,대양품양화층안불동적양화심도진행미구분석.미구분석결과표명:괄당강저양화온도,연장양화시간,가감소양화한제공경적공제오차,제고양화공예적준학성;양화후대양품진행고온가열처리,가감소양화층중적As함량,개선양화층적질량,제고양화공예적열은정성.
Wet oxidation experiments of the samples were carried out in order to improve the power and the conversion efficiency of 808nm vertical-cavity surface-emitting laser (VCSEL). Micro-probe analyses were done at the different oxidation depths of oxidation layer by scaning electron microscope (SEM). The analyzed results show that the oxide-aperture can become more precise by lowering oxidation temperature and proloning oxidation time;the As content in oxidation layer decreases,the oxidation layer quality and thermal stability can be improved by heating the samples after oxidating.