CAJ | 학술논문

以液态金属镓为媒介,利用热蒸发法合成大量非晶SiOx纳米管,这些纳米管管径均匀分布,平均约80 nm,长度大于10 μm,且管内外径比例较小.分析发现,在实验过程中,熔入金属镓液滴中的硅元素和氧元素结合并从液滴的表面饱和析出,形成以镓为中心的非晶SiOx纳米管状结构.在室温中,利用260 nm的激发光源激发SiOx纳米管,发现在蓝光波段附近发出强而稳定的PL谱线,这可能与样品中的氧缺陷和空位有关.
이액태금속가위매개,이용열증발법합성대량비정SiOx납미관,저사납미관관경균균분포,평균약80 nm,장도대우10 μm,차관내외경비례교소.분석발현,재실험과정중,용입금속가액적중적규원소화양원소결합병종액적적표면포화석출,형성이가위중심적비정SiOx납미관상결구.재실온중,이용260 nm적격발광원격발SiOx납미관,발현재람광파단부근발출강이은정적PL보선,저가능여양품중적양결함화공위유관.
Amorphous SiOx nanotubes with homogeneous diameters were fabricated in large-scale on silicon substrate by thermal evaporation method, with liquid gallium as medium. The average diameter of tubes is about 80 nm and the length is more than l0 μm, with small ratio between the inner and outer diameter of the tube. The silicon element in the substrate and the residual oxygen element in reaction chamber were first dissolved into liquid Ga. Then the SiOx precipitated from the surface of gallium droplet, forming the nanotube structure with Ga droplet being the center. The room temperature photoluminescence measurements under excitation at 260 nm show that the SiOx nanotubes has a strong blue emission at 453 nm with two shoulders at 410 and 480 nm respectively, which may be related to oxygen defects. The preparation method improved the traditional complicated method and also provided a new way to fabricate SiOx nanotubes in large quantity.