微电子学
微電子學
미전자학
MICROELECTRONICS
2009年
6期
848-851,856
,共5页
浮置场限环%击穿电压模型%终端结构
浮置場限環%擊穿電壓模型%終耑結構
부치장한배%격천전압모형%종단결구
Floating field ring%Breakdown voltage model%Termination
基于B.J.Baliga的击穿电压理论,通过求解双边突变圆柱结的泊松方程,提出了单个浮置场限环终端结构的击穿电压解析模型.该模型计算结果与模拟结果的误差在±7%之内,具有精度高、应用范围广等特点,可以帮助设计者初步确定浮置场限环注入窗口大小及与主结的间距等关键参数.
基于B.J.Baliga的擊穿電壓理論,通過求解雙邊突變圓柱結的泊鬆方程,提齣瞭單箇浮置場限環終耑結構的擊穿電壓解析模型.該模型計算結果與模擬結果的誤差在±7%之內,具有精度高、應用範圍廣等特點,可以幫助設計者初步確定浮置場限環註入窗口大小及與主結的間距等關鍵參數.
기우B.J.Baliga적격천전압이론,통과구해쌍변돌변원주결적박송방정,제출료단개부치장한배종단결구적격천전압해석모형.해모형계산결과여모의결과적오차재±7%지내,구유정도고、응용범위엄등특점,가이방조설계자초보학정부치장한배주입창구대소급여주결적간거등관건삼수.
An analytical breakdown voltage model of single floating field ring termination was proposed base on B.J.Baliga's theory of breakdown voltage and Possion's Equation.The error between calculation and simulation results are within ±7%.The model can help designer define key parameters, such as diffusion area of the floating field ring and pitch-width between the main junctions and the floating field ring.The model features high precision and wide application.