加热去氩处理工艺对离子束混合沉积的C-SiC涂层阻氢性能的影响
가열거아처리공예대리자속혼합침적적C-SiC도층조경성능적영향
Effect of Eliminating Argon by Heat-Treatment on Hydrogen Resistance of C-SiC Films Deposited by Ion Beam Mixing
저자의 최근 논문