CAJ | 학술논문

设计了电容式加速度计的信号检测电路,与电容式加速度计敏感单元进行联调和测试,并进行了标定.为减小体积,提高电容式加速度计的检测精度,采用厚膜混合集成工艺,将检测电路和电容式加速度计敏感单元集成于一体,并进行了电路测试和性能测试.测试数据表明,其测试精度提高了一个数量级,线性度和温度特性均有很大的改善.
설계료전용식가속도계적신호검측전로,여전용식가속도계민감단원진행련조화측시,병진행료표정.위감소체적,제고전용식가속도계적검측정도,채용후막혼합집성공예,장검측전로화전용식가속도계민감단원집성우일체,병진행료전로측시화성능측시.측시수거표명,기측시정도제고료일개수량급,선성도화온도특성균유흔대적개선.
The signal detection circuit is designed, join with the capacitive accelerometer, later is tested and demarcated. In order to minish the volume and improve the detection precision, the thick-film mixed technics is used to intergrated the detection circuit and capacitive accelerometer. The circuit is tested and capability is tested, the result shown the test precision is improved one order of magnitude, the linearity and temperature characteristic are improved.