稀有金属材料与工程
稀有金屬材料與工程
희유금속재료여공정
RARE METAL MATERIALS AND ENGINEERNG
2009年
z2期
762-766
,共5页
封宾%何大伟%富鸣%杜玙璠%鞠长滨%王永生
封賓%何大偉%富鳴%杜玙璠%鞠長濱%王永生
봉빈%하대위%부명%두여번%국장빈%왕영생
掺铝氧化锌%红外辐射%涂层材料%掺杂半导体
摻鋁氧化鋅%紅外輻射%塗層材料%摻雜半導體
참려양화자%홍외복사%도층재료%참잡반도체
Al-doped ZnO%infrared emissivity%coated materials%doped semiconductor
采用溶胶-凝胶法合成Al掺杂ZnO胶体,通过浸涂法在石英衬底上制备不同退火温度的ZAO薄膜.通过XRD、FT-IR、IR-2型红外辐射仪等手段对薄膜进行表征并研究不同工艺条件对薄膜红外性能的影响.结果显示,Al的掺杂并未改变ZnO的晶型结构,薄膜材料具有沿(002)晶面趋向性生长的特点.ZAO薄膜在可见光区具有高透过率,平均透过率在80%左右,在红外波段具有较高的透过率,所得到的ZAO薄膜在红外波段具有较低的发射率.
採用溶膠-凝膠法閤成Al摻雜ZnO膠體,通過浸塗法在石英襯底上製備不同退火溫度的ZAO薄膜.通過XRD、FT-IR、IR-2型紅外輻射儀等手段對薄膜進行錶徵併研究不同工藝條件對薄膜紅外性能的影響.結果顯示,Al的摻雜併未改變ZnO的晶型結構,薄膜材料具有沿(002)晶麵趨嚮性生長的特點.ZAO薄膜在可見光區具有高透過率,平均透過率在80%左右,在紅外波段具有較高的透過率,所得到的ZAO薄膜在紅外波段具有較低的髮射率.
채용용효-응효법합성Al참잡ZnO효체,통과침도법재석영츤저상제비불동퇴화온도적ZAO박막.통과XRD、FT-IR、IR-2형홍외복사의등수단대박막진행표정병연구불동공예조건대박막홍외성능적영향.결과현시,Al적참잡병미개변ZnO적정형결구,박막재료구유연(002)정면추향성생장적특점.ZAO박막재가견광구구유고투과솔,평균투과솔재80%좌우,재홍외파단구유교고적투과솔,소득도적ZAO박막재홍외파단구유교저적발사솔.
Al-doped ZnO(ZAO)thin film was deposited on quartz glass by sol-gel process with different sintering temperatures. The infrared characters and the effect of technics were investigated through X-ray diffraction (XRD), FT-IR and IR-2 infrared actinograph. The XRD results show that the phase structure of ZAO thin films was the same as that of ZnO with highly C-axis oriented. The FT-IR results show that ZAO thin films had a high transparence ( about 80% ) for visible light and a high transparence for infrared.The ZAO thin films take a low infrared emissivity.