CAJ | 학술논문

介绍了适应大直径探针台的晶圆自动传输系统及其主要的组成部分——一片盒承载台、关节机械手、预对准装置。应用动力学分析证明R-θ型机械手的直线运动轨迹，阐述了机械式和光学预对准装置的主要原理，说明了晶圆自动传输系统的应用前景。
개소료괄응대직경탐침태적정원자동전수계통급기주요적조성부분——일편합승재태、관절궤계수、예대준장치。응용동역학분석증명R-θ형궤계수적직선운동궤적，천술료궤계식화광학예대준장치적주요원리，설명료정원자동전수계통적응용전경。
This article describes wafer auto-transfer system for large diameter probe, summarizes it constitutes, which is loadport, wafer robot and pre-aligner. The kinetics analysis of R-θ type wafer robot is analyzed to prove its moving track which moves along line, it introduced the principle of machinery and photic pre-aligner, and illuminates the application foreground of wafer auto-transfer system.