光电工程
光電工程
광전공정
OPTO-ELECTRONIC ENGINEERING
2010年
4期
88-92
,共5页
衍射光学%复合型光子筛%成像%制造数据量
衍射光學%複閤型光子篩%成像%製造數據量
연사광학%복합형광자사%성상%제조수거량
diffraction optics%composite photon sieves%imaging%manufacturing data
传统光子筛在大口径成像领域具有衍射效率低和制造数据量巨大的缺陷,这导致它们很难在实际应用中被采用.本文提出了一种复合型光子筛,该复合型光子筛将普通光子筛半径的中间1/3部分用波带环来替代.仿真结果显示,采用这种设计的光子筛不仅可以有效减小制造数据量,还能提高衍射效率.我们在成像试验中对比了具有相同特征尺寸的普通光子筛和复合型光子筛,结果显示复合型光予筛能够减少38%的设计数据量并且具有更高的成像对比度.因此,这种复合型光子筛在大口径X射线成像领域中具有很好的应用前景.
傳統光子篩在大口徑成像領域具有衍射效率低和製造數據量巨大的缺陷,這導緻它們很難在實際應用中被採用.本文提齣瞭一種複閤型光子篩,該複閤型光子篩將普通光子篩半徑的中間1/3部分用波帶環來替代.倣真結果顯示,採用這種設計的光子篩不僅可以有效減小製造數據量,還能提高衍射效率.我們在成像試驗中對比瞭具有相同特徵呎吋的普通光子篩和複閤型光子篩,結果顯示複閤型光予篩能夠減少38%的設計數據量併且具有更高的成像對比度.因此,這種複閤型光子篩在大口徑X射線成像領域中具有很好的應用前景.
전통광자사재대구경성상영역구유연사효솔저화제조수거량거대적결함,저도치타문흔난재실제응용중피채용.본문제출료일충복합형광자사,해복합형광자사장보통광자사반경적중간1/3부분용파대배래체대.방진결과현시,채용저충설계적광자사불부가이유효감소제조수거량,환능제고연사효솔.아문재성상시험중대비료구유상동특정척촌적보통광자사화복합형광자사,결과현시복합형광여사능구감소38%적설계수거량병차구유경고적성상대비도.인차,저충복합형광자사재대구경X사선성상영역중구유흔호적응용전경.
Large aperture photon sieve for imaging often has low efficiency and huge size of GDSII file, which makes their implementation difficult in practice. The composite photon sieve which compounds the zone plate to the R/3-2R/3 part of the conventional photon sieve is presented. The simulation result shows that the element can reach higher diffraction efficiency and significantly reduce the GDSII file size. In the experiment, a conventional photon sieve and a composite photon sieve with the same feature size are designed. The imaging result shows that the composite photon sieve can reduce the GDSII file size by 38% and has a better contrast than the conventional photon sieve. Therefore, the composite photon sieve is a good element applied in large aperture imaging in soft X-rays.