CAJ | 학술논문

采用放电泵浦KrF准分子激光放大器放大波长为248.4 nm的紫外超短脉冲激光.对于能量为0.7 mJ、脉宽为550 fs的输入脉冲,在光束直径保持10 mm不变的条件下,能量放大到15 mJ,脉宽展宽到1 200 fs.为了压缩输出脉冲宽度,分析了群速度色散和自相位调制效应对脉宽展宽的影响.利用棱镜对,采用4种不同的实验方案对脉冲引入负的线性频率啁啾,以补偿KrF准分子激光放大器CaF_2窗镜中的群速度色散和自相位调制对脉冲引入的正的线性频率啁啾.结果表明:在放大器之前放置棱镜对的方式可以在保持输出脉冲能量为15 mJ的同时,在棱镜对间距为110 cm的条件下,将输出脉冲宽度压缩到370 fs,输出波长为248.4 nm、带宽为0.4 nm.
채용방전빙포KrF준분자격광방대기방대파장위248.4 nm적자외초단맥충격광.대우능량위0.7 mJ、맥관위550 fs적수입맥충,재광속직경보지10 mm불변적조건하,능량방대도15 mJ,맥관전관도1 200 fs.위료압축수출맥충관도,분석료군속도색산화자상위조제효응대맥관전관적영향.이용릉경대,채용4충불동적실험방안대맥충인입부적선성빈솔조추,이보상KrF준분자격광방대기CaF_2창경중적군속도색산화자상위조제대맥충인입적정적선성빈솔조추.결과표명:재방대기지전방치릉경대적방식가이재보지수출맥충능량위15 mJ적동시,재릉경대간거위110 cm적조건하,장수출맥충관도압축도370 fs,수출파장위248.4 nm、대관위0.4 nm.
The discharge-pumped KrF excimer was used to amplify ultraviolet ultrashort pulse laser with wavelength of 248.4 nm.The laser energy was amplified from 0.7 mJ to 15 mJ,and the pulse duration was broadened from 550 fs to 1 200 fs, with the beam diameter of 10 mm unchanged. To compress the output pulse duration, the effects of group velocity dispersion and self phase modulation were analyzed,and experimental schemes with four different prism pair were used to introduce negative frequency chirp into the pulse laser in order to compensate the positive frequency chirp introduced by group velocity dispersion and self phase modulation in the CaF2 windows of the amplifer.The results show that if the prism pair is put before the amplifier, the pulse duration can be compressed to 370 fs when the length of the prism pair is 110 cm, while the output energy remains 15 mJ, the output wavelength is 248.4 nm,and the bandwidth is 0.4 nm.