CAJ | 학술논문

类金刚石膜(Diamond-like Carbon,DLC)具有优异的气体阻隔性能.在PET瓶体内表面制备DLC阻隔涂层时,阻隔涂层的均匀性会受到瓶体内流场结构(气压分布、速度分布等)的显著影响.本文应用格子波耳兹曼方法(Lattice Boltzmann Method/Model,LBM)对PET瓶体内制备DLC阻隔涂层时的流场结构进行模拟,研究了送气速度、气体运动粘度系数和装置结构变化时瓶体内部流场结构的变化.研究结果表明,降低进气速度和提高气体运动粘度系数有利于减弱回流而获得层流结构;装置结构的调整能够改变瓶体内的流场结构,采用恰当的异型装置可以获得较理想的流场结构,对实验工作具有一定的指导意义.
류금강석막(Diamond-like Carbon,DLC)구유우이적기체조격성능.재PET병체내표면제비DLC조격도층시,조격도층적균균성회수도병체내류장결구(기압분포、속도분포등)적현저영향.본문응용격자파이자만방법(Lattice Boltzmann Method/Model,LBM)대PET병체내제비DLC조격도층시적류장결구진행모의,연구료송기속도、기체운동점도계수화장치결구변화시병체내부류장결구적변화.연구결과표명,강저진기속도화제고기체운동점도계수유리우감약회류이획득층류결구;장치결구적조정능구개변병체내적류장결구,채용흡당적이형장치가이획득교이상적류장결구,대실험공작구유일정적지도의의.
The flow field in the growth of diamond-like carbon(DLC),gas barrier films by RF plasma enhanced chemical vapor deposition(RFPECVD)on the inner walls of polythylene terephthalate(PET)bottles,was simulated with lattice Boltzmann model(LBM).The impacts of the flow field characteristics,including pressure distribution,velocity distribution of various gases,coefficients of kinetic viscosity,configuration of the gas inlet nozzle and gas flow rate,on the uniformity of DLC films were studied.The results show that the flow field characteristics significantly affect the uniform deposition of the DLC films.For instance,the back-flow can be reduced to obtain a laminar flow by decreasing the gas flow rate and increasing the coefficient of kinetic viscosity.And the geometry optimization of the gas nozzle strongly affects the flow field,and the uniformity of DLC film deposition.