脉冲偏压对(Ti,Al)N/TiN/(Ti,Al)N多层复合涂层成分和硬度的影响
맥충편압대(Ti,Al)N/TiN/(Ti,Al)N다층복합도층성분화경도적영향
Effect of Pulse-Bias on Components and Micro-Hardness of (Ti,Al)N/TiN/(Ti,Al)N Multi-Layer Composite Coating
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