CAJ | 학술논문

介绍了当前测量薄/厚压电参数的2大类方法:直接测量法(包括Berlincourt法、圆片弯曲技术、激光干涉法、扫描激光多普勒振动法、原子力显微镜法)和间接测量法(包括体声波响应和表面声波响应法、复合谐振法).详细分析了这些方法的基本原理、测试表征、应用状况和存在的问题,比较了这些方法的优缺点.结果表明,高分辨率的双束激光干涉和表面扫描振动相结合的方法将是评估压电参数方便、准确和可靠的方法,有望成为将来表征薄/厚膜压电特性的标准方法.
개소료당전측량박/후압전삼수적2대류방법:직접측량법(포괄Berlincourt법、원편만곡기술、격광간섭법、소묘격광다보륵진동법、원자력현미경법)화간접측량법(포괄체성파향응화표면성파향응법、복합해진법).상세분석료저사방법적기본원리、측시표정、응용상황화존재적문제,비교료저사방법적우결점.결과표명,고분변솔적쌍속격광간섭화표면소묘진동상결합적방법장시평고압전삼수방편、준학화가고적방법,유망성위장래표정박/후막압전특성적표준방법.
Two categories of measuring piezoelectric properties of thin/thick films are introduced in this paper: direct measurement(including Belincourt method, wafer flexure technique, laser interferometer method, laser scanning doppler vibrometer method, atomic force microscopy) and indirect measurement (including bulk acoustic wave and surface acoustic wave method, composite resonators). The basic principle, measurement characterization, application status and problems are illustrated specifically in this paper, the advantages/disadvantages of these techniques are ana-lyzed for piezoelectric applications, and the results show that combining the high resolution of the interferometer and the surface scanning ability of laser scanning vibrometer may lead to a convenient, accurate and reliable method for as-sessing piezoelectric coefficient. And this method may be a standard one for the development trend of measurement technologies for piezoelelctric thin/thick film.