CAJ | 학술논문

横向场激励(lateral-field-excitation,LFE)压电传感器因其在液相测量中的优越特性而引起广泛关注.最近的研究表明LFE器件具有纯LFE、伪LFE和准LFE 3种不同的工作模式.为了研究不同电极结构的纯LFE器件的特性,文中在相同的铌酸锂晶体基板上制作了5种不同电极结构的纯LFE压电传感器,并进行了性能测试和对比分析.结果表明:两圈对称螺旋电极结构与单gap电极结构的LFE器件比另外3个LFE器件具有更高的Q值.当传感器从空气中移到水中和从水中移到NaCl溶液中时,谐振频率均减小,而当传感器被从水中移到异丙醇溶液中时,谐振频率增大,其中双间隔电极结构的LFE压电传感器谐振频率变化幅度最大.
횡향장격려(lateral-field-excitation,LFE)압전전감기인기재액상측량중적우월특성이인기엄범관주.최근적연구표명LFE기건구유순LFE、위LFE화준LFE 3충불동적공작모식.위료연구불동전겁결구적순LFE기건적특성,문중재상동적니산리정체기판상제작료5충불동전겁결구적순LFE압전전감기,병진행료성능측시화대비분석.결과표명:량권대칭라선전겁결구여단gap전겁결구적LFE기건비령외3개LFE기건구유경고적Q치.당전감기종공기중이도수중화종수중이도NaCl용액중시,해진빈솔균감소,이당전감기피종수중이도이병순용액중시,해진빈솔증대,기중쌍간격전겁결구적LFE압전전감기해진빈솔변화폭도최대.
Lateral-field-excitation (LFE) sensors have been widely investigated due to their superior performance in liquid sensing applications. Recent studies show that LFE sensors have three different kind of working modes,pure-LFE, quasi-LFE, and pseudo-LFE mode. In order to study the characteristics of pure-LFE piezoelectric sensors, several 4.5 MHz LFE devices with different electrode configurations were fabricated and tested. Devices with the two-turn symmetric spiral electrode and the single-gap electrode offer higher Q value than other devices. When the sensing surface of these devices were tested from air to water and from water to NaCl water solution respectively, their resonant frequencies decreased. However, when they were moved from water to isopropanol water solution, the resonant frequencies increased. The device with the dual-gap electrode shows the maximum frequency change compared to other devices.