CAJ | 학술논문

介绍了一种结构简单、易装配的高精度压电尺蠖式位移致动器,阐述了致动器的工作原理和结构.致动器采用叠堆式压电陶瓷作为驱动,利用柔性铰链作为位移放大机构,能够可靠地实现光轴的双向运动.位移分辨率可以达到纳米级别,步距可以在几纳米至几毫米之间任意选择.
개소료일충결구간단、역장배적고정도압전척확식위이치동기,천술료치동기적공작원리화결구.치동기채용첩퇴식압전도자작위구동,이용유성교련작위위이방대궤구,능구가고지실현광축적쌍향운동.위이분변솔가이체도납미급별,보거가이재궤납미지궤호미지간임의선택.
A precision piezoelectric actuator was introduced,and its working principle and mechanical design were presented. Driven by laminated PZT and utilizing flexible hinge as clamp, this actuator could move back and forth freely,and the step could adjust from several nanometers to microns. The advantages could be featured with simple structure,easy assembly,convenient operation and control.