CAJ | 학술논문

PHEMT结构一种高电子迁移率品体管,以其高频和低噪声等方面的优越性,成为当今微电子领域中最活跃的研究主题之一.将其良好的力敏特性应用在加速度计方面更是成为前沿的研究方向.基于GaAs基PHEMT结构压阻效应,设计加工出一种悬臂梁式微加速度传感器,通过力作用在加速度计上,改变PHEMT结构漏极电流的输出,并通过外围测试电路来检测该电流变化,从而实现力电转换.文中,对其基本原理和结构设计进行阐述,并进行力学特性的研究.结果表明,在动态测试下.PHEMT结构的漏极输出电流与栅压、漏压之间的关系与静态测试Ⅰ-Ⅴ特性曲线保持一致.该加速度计具有良好的线性特性,经过测试在饱和区灵敏度为0.177 mV/g_n.
PHEMT결구일충고전자천이솔품체관,이기고빈화저조성등방면적우월성,성위당금미전자영역중최활약적연구주제지일.장기량호적력민특성응용재가속도계방면경시성위전연적연구방향.기우GaAs기PHEMT결구압조효응,설계가공출일충현비량식미가속도전감기,통과력작용재가속도계상,개변PHEMT결구루겁전류적수출,병통과외위측시전로래검측해전류변화,종이실현력전전환.문중,대기기본원리화결구설계진행천술,병진행역학특성적연구.결과표명,재동태측시하.PHEMT결구적루겁수출전류여책압、루압지간적관계여정태측시Ⅰ-Ⅴ특성곡선보지일치.해가속도계구유량호적선성특성,경과측시재포화구령민도위0.177 mV/g_n.
Pseudomorphic HEMT has become a most active research topic of micro-electronics field because of its advantages in high-frequency and low-yawp. It is one of the research directions of the most forward position to fabricate accelerator with the force-sensitive characteristic of PHEMT. According to the piezoresistive effect theory of GaAs-based PHEMT, a novel cantilever accelerated sensor has been designed and fabricated. The drain current output of PHEMT changes when the force is applied on the cantilever. And then the change of drain current is detected through the extemal testing circuit. The structure and mechanical characteristics are described in this paper. The testing results show that the relationship between drain current and gate voltage, drain voltage under the dynamic test is accordant with the static IV characteristic. The accelerometer has good linearity and the sensitivity has been calculated that is 0. 177 mV/g_n, in saturation region.