CAJ | 학술논문

采用AlBi2+2%AlB10电弧靶与Ti靶中频磁控溅射共沉积的工艺,在高速钢基体上形成Ti-Al-B-N多元复合涂层.电子扫描电镜(SEM)、X射线衍射(XRD)分析结果表明:涂层由TiN的柱状结构转变为TiAlBN的多层混合结构,组织更为致密均匀;通过调节电弧电流,增加Al、B元素剂量,涂层晶面取向生长增多,并逐渐出现新相.涂层的显微硬度和耐磨性测试表明,随膜层中Al、B成分的增加,膜层维氏硬度增大,耐磨性能提高.
채용AlBi2+2%AlB10전호파여Ti파중빈자공천사공침적적공예,재고속강기체상형성Ti-Al-B-N다원복합도층.전자소묘전경(SEM)、X사선연사(XRD)분석결과표명:도층유TiN적주상결구전변위TiAlBN적다층혼합결구,조직경위치밀균균;통과조절전호전류,증가Al、B원소제량,도층정면취향생장증다,병축점출현신상.도층적현미경도화내마성측시표명,수막층중Al、B성분적증가,막층유씨경도증대,내마성능제고.
Ti-Al-B-N compound coatings were deposited on polished surface of high speed steel by arc ion plating together with intermediate frequency unbalanced magnetron sputtering.The analysis results of SEM and XRD indicate that the size of droplets on the surface of TiAlBN is smaller than that on the TiN films,the defects are eliminated on a large scale,and the microstructurc of the sulfate is more compact and uniform.The lattice distortion of TiN films is caused by the addition of AI,B element,and the new phase appeares.Its surface hardness and wear resistance are also improved obviously.