CAJ | 학술논문

针对超声换能器设计上存在的双共振峰或多共振峰等常见问题,提出了一种基于频率灵敏度方法的换能器结构优化设计方法。以芯片键合超声换能器为例,采用模态频率灵敏度的方法,通过最小量地修正变幅杆的直径,实现轴向工作频率与其他非工作频率的分离,有效地抑制了工作频率附近杂散的非工作模态对自身模态的干扰,确保在工作状态下换能器被驱动在单一的工作频率,从而提高了超声能量输出的稳定性。
침대초성환능기설계상존재적쌍공진봉혹다공진봉등상견문제,제출료일충기우빈솔령민도방법적환능기결구우화설계방법。이심편건합초성환능기위례,채용모태빈솔령민도적방법,통과최소량지수정변폭간적직경,실현축향공작빈솔여기타비공작빈솔적분리,유효지억제료공작빈솔부근잡산적비공작모태대자신모태적간우,학보재공작상태하환능기피구동재단일적공작빈솔,종이제고료초성능량수출적은정성。
To the common problems that double resonant peaks or multiple resonant peaks in ultrasonic transducer,a structure optimization method based on frequency sensitivity was introduced in this paper.For an ultrasonic transducer with double peaks used in wire bonding,the modal frequency sensitivity was investigated to control the double peak problems by modifying the minimal diameter of the horn,which can control effectively the disturb from the non-working modal vibration and the transducer can be driven at the resonant frequency,further the stable outputs of the ultrasonic energy will be improved.