CAJ | 학술논문

研究了X射线成像波带片的工作原理和制作工艺.从理论上分析了波带片的空间分辨率与最外环宽度的关系,以及波带片衍射效率与厚度和折射率的关系.利用国家同步辐射实验室发展的加工工艺,即电子束光刻技术和X射线光刻技术结合制作波带片.实验结果表明:波带片最外环宽度为150 nm,高宽比为4,基本满足高分辨X射线成像波带片的高空间分辨率、大高宽比、高精度等要求.
연구료X사선성상파대편적공작원리화제작공예.종이론상분석료파대편적공간분변솔여최외배관도적관계,이급파대편연사효솔여후도화절사솔적관계.이용국가동보복사실험실발전적가공공예,즉전자속광각기술화X사선광각기술결합제작파대편.실험결과표명:파대편최외배관도위150 nm,고관비위4,기본만족고분변X사선성상파대편적고공간분변솔、대고관비、고정도등요구.
In order to investigate the principle and fabrication technique of Fresnel zone plates(FZPs),a diffractive optical element used in X-ray imaging with the best resolution currently is presented.A theoretical analysis of the spatial resolution depending on the outermost zone width is given.An analyrical expression of the diffraction efficiency in terms of thickness and X-ray refractive index of the zone plate is also provided.Electron beam lithography combined with X-ray lithography is employed to fabricate FZPs.Experimental results indicate that the outermost zone width is 150 nm and the aspect ratio is 4,which satisfies the X-ray imaging system requirements of high resolution.high aspect ratio as well as high precision.