CAJ | 학술논문

基于一阶速率方程,讨论了恒定电压应力下应力电流的饱和行为.通过对应力电流的拟合,发现存在三类缺陷产生的前身.更进一步的统计实验显示,在缺陷产生时间常数、击穿时间以及应力电压之间存在着明确的关系.这意味着缺陷产生时间常数能够被用于有效预测氧化层的寿命.与常规的氧化层击穿实验相比,基于缺陷产生时间常数的预测更快、更有效.
기우일계속솔방정,토론료항정전압응력하응력전류적포화행위.통과대응력전류적의합,발현존재삼류결함산생적전신.경진일보적통계실험현시,재결함산생시간상수、격천시간이급응력전압지간존재착명학적관계.저의미착결함산생시간상수능구피용우유효예측양화층적수명.여상규적양화층격천실험상비,기우결함산생시간상수적예측경쾌、경유효.
The saturation behavior of stress current is studied.The three types of precursor sites for trap generation are also introduced by fitting method based on first order rate equation.A further investigation by statistics experiments shows that there are definite relationships among time constant of trap generation,the time-to-breakdown,and stress voltage.It also means that the time constant of trap generation can be used to predict oxide lifetime.This method is faster for TDDB study compared with usual breakdown experiments.