等离子体科学和技术(英文版)
等離子體科學和技術(英文版)
등리자체과학화기술(영문판)
PLASMA SCIENCE & TECHNOLOGY
2002年
4期
1407-1410
,共4页
许沭华%任兆杏%沈克明
許沭華%任兆杏%瀋剋明
허술화%임조행%침극명
radio frequency%inductively coupled plasma%ion source%extraction characteristics
An inductively coupled radio frequency ion source has been developed and its extraction characteristics measured. Beam current density up to 0.11 mA/cm2 was obtained with argon at a rf discharge power of about 140 W. The dependences of ion beam on the discharge parameters such as rf source power, gas pressure and gas flow rate was studied.
