CAJ | 학술논문

阐述了采用MEMS技术与反外延技术相结合在硅片表面制造具有矩形板状立体结构的硅磁敏三极管的设计原理、结构和工艺。结果表明，设计的硅磁敏三极管制造技术不但能与IC工艺相兼容，而且便于集成化，将有广泛的应用领域。
천술료채용MEMS기술여반외연기술상결합재규편표면제조구유구형판상입체결구적규자민삼겁관적설계원리、결구화공예。결과표명，설계적규자민삼겁관제조기술불단능여IC공예상겸용，이차편우집성화，장유엄범적응용영역。
Adopt MEMS techniques and turn- extensing techniques make magnetic-sensitive silicon transistor in the face of the silicon is introduced,the magnetic-sensitive silicon transistor has rectangular structure.The design principle,device structure and technology are also introduced .The result shown technology of the sensor array is using silicon micromachining technology combined with semiconductor IC process and easy to integrated circuit block.The device will have a vast new world of application and dissemination.