CAJ | 학술논문

在纳米结构的检测与表征领域中,温度是影响纳米尺度测量精度的重要误差源.为此,根据测量材料的热物性和空气折射率与光学测量的关系,以计量型原子力显微镜和大范围纳米测量机为例,首先通过设计高精度多点测温系统进行精密的温度测量,分析估计在扫描测量纳米结构过程中温度变化对其测量结果的影响.其次对纳米测昔中温度测量的相关技术问题进行了研究,以保证纳米表征和检测在纳米尺度及其量值上的准确性.
재납미결구적검측여표정영역중,온도시영향납미척도측량정도적중요오차원.위차,근거측량재료적열물성화공기절사솔여광학측량적관계,이계량형원자력현미경화대범위납미측량궤위례,수선통과설계고정도다점측온계통진행정밀적온도측량,분석고계재소묘측량납미결구과정중온도변화대기측량결과적영향.기차대납미측석중온도측량적상관기술문제진행료연구,이보증납미표정화검측재납미척도급기량치상적준학성.
Temperature measurement error is the major factor to influence the precision for the nano-scale measurement in the areas of nano-structure characterization and testing. According to the materials thermophysical properties and the relationship of the air refractivity and optical measurement, metrological atomic force microscope (AFM) and the large range nano-measuring machine ( NMM ) are comprehensive studied. Firstly, high precision multipoint temperature measurement system is designed which can measure the temperature of AFM and NMM. The effect of ambient temperature variation is analyzed and evaluated in the course of scanning measurement Secondly, the related technical problems of the temperature measurement in nano-scale measurement are studied to ensure the nano-structure characterization and measurement are accurate and reliable.