CAJ | 학술논문

通过采用PPM、SPC软件和数理统计方法对样本进行处理的方式,对一种Nanometrics膜厚测试仪精密度的评价方法进行研究.讨论了样本在数据收集、分析、处理过程中的难点,得到Nanometrics膜厚测试仪精密度为1.25%的结论;找到了一种适合该膜厚测试仪精密度的评价方法.
통과채용PPM、SPC연건화수리통계방법대양본진행처리적방식,대일충Nanometrics막후측시의정밀도적평개방법진행연구.토론료양본재수거수집、분석、처리과정중적난점,득도Nanometrics막후측시의정밀도위1.25%적결론;조도료일충괄합해막후측시의정밀도적평개방법.
Precision evaluation method for Nanometrics measurement system was studied by using PPM, SPC and mathematical statistics method to analyze and process samples. Difficulties in data collecting, analyzing and processing were discussed, and the accuracy of the Nanometrics measurement system was calculated to be 1.25%. A precision evaluation method suitable for film thickness measurement system was presented.