CAJ | 학술논문

恒力模式和恒高模式是原子力显微镜的两种主要操作模式.前一种模式通常用于成像在垂直方向变化大的表面,但仅对低空间频率表面有效.后一种模式仅对光滑表面在高分辨率高扫描速度下的成像有用.为克服这些缺点,提出了组合恒高和恒力的新操作模式.使用这个模式,表面形貌的低空间频率成分利用垂直压电扫描器及其控制信号跟踪并测量,高空间频率成分利用悬臂信号测量.然后,表面形貌图像利用组合低频和高频成分得到.仿真结果证明了这种新的操作模式具有高速和高分辨率的优点.
항력모식화항고모식시원자력현미경적량충주요조작모식.전일충모식통상용우성상재수직방향변화대적표면,단부대저공간빈솔표면유효.후일충모식부대광활표면재고분변솔고소묘속도하적성상유용.위극복저사결점,제출료조합항고화항력적신조작모식.사용저개모식,표면형모적저공간빈솔성분이용수직압전소묘기급기공제신호근종병측량,고공간빈솔성분이용현비신호측량.연후,표면형모도상이용조합저빈화고빈성분득도.방진결과증명료저충신적조작모식구유고속화고분변솔적우점.
Atomic force microscope(AFM)is operated in two principal modes,constant-force mode and constant-height mode.The former one is usually used for rougher surfaces in vertical direction but it is valid only for the low spatial frequency surface,while the latter one is only particularly useful forimaging smoother surfaces with high resolution and high scan speed.To overcome these shortcomings,a new operation mode combining constant-height and constant-force mode was proposed in this paper.Using the combined operation mode,the low spatial frequency component of surface profile was tracked and measured by the vertical piezoscanner and the compensating control signal;and the high spatial frequency comportent was measured by cantilever signal.Then the image of surface profile was acquired by combining the low-frequency and high-frequency components.Simulation results demonstrate that the combined operation mode has the advantages of high speed and high resolution.