CAJ | 학술논문

采用镶嵌靶反应磁控溅射技术,通过调节氮分压及基体偏压在M2高速钢基体表面制备了一系列耐热的 (Ti,Al)N硬质薄膜,并用XRD,EDS及纳米压入法、划痕法等方法研究了(Ti, Al)N薄膜的成分、相结构与力学性能的关系.结果表明,氮分压和基体偏压对(Ti, Al)N薄膜取向及Ti、Al、N原子含量有明显影响,从而导致薄膜硬度及膜基结合性能发生变化.研究中,在氮分压为33.3×10~(-3) Pa、基体偏压为-100 V时制备的(Ti, Al)N薄膜力学性能最优,其纳米硬度为43.4 GPa,达到40 GPa超硬薄膜的要求.
채용양감파반응자공천사기술,통과조절담분압급기체편압재M2고속강기체표면제비료일계렬내열적 (Ti,Al)N경질박막,병용XRD,EDS급납미압입법、화흔법등방법연구료(Ti, Al)N박막적성분、상결구여역학성능적관계.결과표명,담분압화기체편압대(Ti, Al)N박막취향급Ti、Al、N원자함량유명현영향,종이도치박막경도급막기결합성능발생변화.연구중,재담분압위33.3×10~(-3) Pa、기체편압위-100 V시제비적(Ti, Al)N박막역학성능최우,기납미경도위43.4 GPa,체도40 GPa초경박막적요구.
The (Ti,Al)N films were deposited by direct current (DC) reactive magnetron sputtering using Ti-Al mosaic target on M2 high speed steel. In the deposition, the nitrogen partial pressure and substrate bias were adjusted for optimizing the deposition process and obtaining good mechanical properties. The composites, structures and mechanical properties of the deposited films were investigated using XRD, EDS, nanoindentation and scratch tests. The results show that the nitrogen partial pressure and substrate bias influence the orientation and composition (Ti, Al and N atoms) of the film. Therefore the hardness and interfacial adhesion of the films are influenced by the deposition details. In this study, the highest hardness of the film was 43.4 GPa, which was obtained in the process of 33.3×10~(-3) Pa N_2 partial pressure and -100 V bias voltage. The value satisfies the standard of super-hard films (>40 GPa).