CAJ | 학술논문

用磁控溅射法制备了不同Cr插层厚度的Co/Cr/Pd系列多层膜样品.通过X射线衍射对该多层膜进行了结构分析；通过测定不同Cr层厚度多层膜的磁力图、磁滞回线，分析了垂直各向异性Ku和矫顽力变化的原因；通过测定该多层膜体系的克尔谱及椭偏率谱，分析了克尔角变化的机理，认为克尔角随Cr插层厚度的增加而下降是由于Pd原子极化减弱所致.
용자공천사법제비료불동Cr삽층후도적Co/Cr/Pd계렬다층막양품.통과X사선연사대해다층막진행료결구분석；통과측정불동Cr층후도다층막적자력도、자체회선，분석료수직각향이성Ku화교완력변화적원인；통과측정해다층막체계적극이보급타편솔보，분석료극이각변화적궤리，인위극이각수Cr삽층후도적증가이하강시유우Pd원자겁화감약소치.
A series of Co/Cr/Pd modulated multilayers with Cr layer thickness XCr ranging from 0 to 1.13nm have been prepared by magnetron sputtering system on 40nm thick Pd buffer.With combimed small- and large-angle X-ray analyses,the layered and crystal structure of the samples were ivestigated.The magnetic hysteresis loops and domain structure were obtained by means of alternating-gradient magnetometer (AGM) and Magnetic Force Microscopy (MFM) methods.The perpendicular magnetic anisotropy and the coercivity of the multilayers decrease with the increase of Cr thickness,which was ascribed to the reduction of the polarization of Pd atoms and the interlayer roughness,respectively.The Kerr rotation and ellipticity of the multilayers were also studied.The decrease of Kerr rotation with the increase of the Cr thickness was assumed to be due to the decrease of the polarization of Pd atoms.