CAJ | 학술논문

为了消除SiC反射镜的固有缺陷,提高反射式光学系统的信噪比,使用SiC表面改性技术对同轴三反射(TMC)光学系统的SiC反射镜进行了处理.首先,应用等离子体辅助沉积(PIAD)技术沉积了一层Si改性层,接着对改性层进行精密抛光,然后在反射镜表面镀制Ag膜和增强膜,最后获得了表面改性对TMC光学系统信噪比的影响.Wyko轮廓仪测试表明,SiC反射镜的粗糙度R_a由10.42 nm降低到了0.95 nm;镀制高反射膜后,主镜、次镜、三镜及折叠镜在0.5～0.8 μm可见光波段的反射率＞98%.计算结果表明,应用了表面改性技术后TMC反射式光学系统的信噪比提高了5%以上,说明SiC表面改性技术是一种提高TMC光学系统信噪比的有效方法.
위료소제SiC반사경적고유결함,제고반사식광학계통적신조비,사용SiC표면개성기술대동축삼반사(TMC)광학계통적SiC반사경진행료처리.수선,응용등리자체보조침적(PIAD)기술침적료일층Si개성층,접착대개성층진행정밀포광,연후재반사경표면도제Ag막화증강막,최후획득료표면개성대TMC광학계통신조비적영향.Wyko륜곽의측시표명,SiC반사경적조조도R_a유10.42 nm강저도료0.95 nm;도제고반사막후,주경、차경、삼경급절첩경재0.5～0.8 μm가견광파단적반사솔＞98%.계산결과표명,응용료표면개성기술후TMC반사식광학계통적신조비제고료5%이상,설명SiC표면개성기술시일충제고TMC광학계통신조비적유효방법.
A SiC surface modification technique was applied to a TMC (Three Mirror Coaxis) reflective optical system to eliminate the intrinsic defects of SiC mirrors and to improve the Signal Noise Ratio(SNR) of the reflective optical system. Firstly, a Si layer as a modified coating was deposited on the SiC mirror surface.Then, a fine polish process was employed in the modified layer and the high reflective coatings composed of a silver film and enhancing films were deposited on the mirror surface. Finally, the effect of surface modification on the TMC reflective optical system was obtained.The measurement by a Wyko profilometer indicates that the roughness R_a of the SiC mirror is reduced from 10.42 nm to 0.95 nm and the reflectivities of the primary mirror, secondary mirror, tertiary mirror and fold mirror are all higher than 98% between 0.5～0.8 μm. Calculation results indicate that the SNR has improved more than 5% after surface modification, which proves that surface modification technique is an effective way to improve the SNR of a TMC reflective optical system.