CAJ | 학술논문

通过建立KDP晶体超精密加工机床气体静压主轴的三维有限元模型,在考虑主轴装配的接触关系和螺钉预紧力的情况下,计算得到了主轴结构在工作状态下的变形.计算结果表明,由于结合面和主轴受拉伸长,轴承气膜间隙增大;气体压力导致止推板从中心到边缘发生翘曲变形,止推轴承的气膜为楔形.实验结果表明,有限元模型的计算误差小于11%.
통과건립KDP정체초정밀가공궤상기체정압주축적삼유유한원모형,재고필주축장배적접촉관계화라정예긴력적정황하,계산득도료주축결구재공작상태하적변형.계산결과표명,유우결합면화주축수랍신장,축승기막간극증대;기체압력도치지추판종중심도변연발생교곡변형,지추축승적기막위설형.실험결과표명,유한원모형적계산오차소우11%.
Three-dimensional finite element model of the aerostatic spindle of potassium dihydrogen phosphate (KDP) crystal ultra-precision machine tool was modeled. On the basis of considering the contact relation of spindle assembling and the pre-tightness force of bolts, the structural deformation of spindle under working conditions was gotten. The calculation results show that thrust bearing gas film gap is enlarged because junction surface and spindle are stretched. The action of gas pressure brings bending deflection from thrust plate's centre to its edge. The thrust bearing gas film is wedge. The experiment results indicate that the calculation error of finite element model is less than 11%.